Micro device stabilization post

ABSTRACT

A method and structure for stabilizing an array of micro devices is disclosed. The array of micro devices is formed on an array of stabilization posts formed from a thermoset material. Each micro device includes a bottom surface that is wider than a corresponding stabilization post directly underneath the bottom surface.

RELATED APPLICATIONS

This application is a divisional application of co-pending U.S. patentapplication Ser. No. 13/625,825 filed Sep. 24, 2012, which isincorporated herein by reference.

BACKGROUND

1. Field

The present invention relates to micro devices. More particularlyembodiments of the present invention relate to the stabilization ofmicro device on a carrier substrate.

2. Background Information

Integration and packaging issues are one of the main obstacles for thecommercialization of micro devices such as radio frequency (RF)microelectromechanical systems (MEMS) microswitches, light-emittingdiode (LED) display systems, and MEMS or quartz-based oscillators.

Traditional technologies for transferring of devices include transfer bywafer bonding from a transfer wafer to a receiving wafer. One suchimplementation is “direct printing” involving one bonding step of anarray of devices from a transfer wafer to a receiving wafer, followed byremoval of the transfer wafer. Another such implementation is “transferprinting” involving two bonding/de-bonding steps. In transfer printing atransfer wafer may pick up an array of devices from a donor wafer, andthen bond the array of devices to a receiving wafer, followed by removalof the transfer wafer.

Some printing process variations have been developed where a device canbe selectively bonded and de-bonded during the transfer process. In bothtraditional and variations of the direct printing and transfer printingtechnologies, the transfer wafer is de-bonded from a device afterbonding the device to the receiving wafer. In addition, the entiretransfer wafer with the array of devices is involved in the transferprocess.

SUMMARY OF THE INVENTION

A structure and method of forming an array of micro devices which arepoised for pick up are disclosed. In an embodiment, a structure includesa stabilization layer including an array of stabilization posts, and thestabilization layer is formed of a thermoset material such as epoxy orbenzocyclobutene (BCB) which is associated with 10% or less volumeshrinkage during curing, or more particularly about 6% or less volumeshrinkage during curing. An array of micro devices are on the array ofstabilization posts, with each micro device including a bottom surfacethat is wider than a corresponding stabilization post directlyunderneath the bottom surface. An array of bottom conductive contactsmay be formed on the bottom surfaces of the array micro devices. Anarray of top conductive contacts may be formed on top of the array ofmicro devices. In an embodiment the array of stabilization posts areseparated by a pitch of 1 ηm to 100 μm, or more specifically 1 μm to 10μm.

The stabilization layer may be bonded to a carrier substrate. Anadhesion promoter layer may be formed between the carrier substrate andthe stabilization layer to increase adhesion. A sacrificial layer mayalso be located between the stabilization layer and the array of microdevices, where the array of stabilization posts also extend through athickness of the sacrificial layer. In an embodiment, the sacrificiallayer is formed of a material such as an oxide or nitride. An etch stopdetection layer, such as titanium, may also be located between thesacrificial layer and the array of micro devices, with the array ofstabilization posts extending though a thickness of the etch stopdetection layer. An adhesion promoter layer may also be formed betweenthe stabilization layer and the sacrificial layer to increase adhesion,where array of stabilization posts also extend through a thickness ofthe adhesion promoter layer.

The array of micro devices may be micro LED devices, and may be designedto emit a specific wavelength such as a red, green, or blue light. In anembodiment, each micro LED device includes a device layer formed of ap-doped semiconductor layer, one or more quantum well layers over thep-doped semiconductor layer, and an n-doped semiconductor layer. Forexample, where the micro LED device is designed to emit a red light, thep-doped layer may comprise GaP and the n-doped layer may compriseAlGaInP. The device layer lay also include an ohmic contact layer suchas GaAs over the n-doped semiconductor layer.

The array of stabilization posts may be centered with an x-y centerbelow the array of micro devices or may be off-centered with an x-ycenter below the array of micro devices. Each stabilization post mayspan underneath an edge of two adjacent micro devices. Also, two or morestabilization posts can be formed beneath each micro device.

In an embodiment, forming an array of micro devices includes forming anarray of stabilization posts over a device layer, transferring the arrayof stabilization posts and the device layer to a carrier substrate, andpatterning the device layer to form a corresponding array of microdevices over the array of stabilization posts. The patterned sacrificiallayer may also be removed to form an open space below each micro device.Forming the array of stabilization posts may include forming a patternedsacrificial layer including an array of openings over the device layer,and forming a stabilization layer over the patterned sacrificial layerand within the array of openings to form the array of stabilizationposts. In an embodiment, the array of openings are formed directly overan array of conductive contacts on the device layer.

Transferring the array of stabilization posts and the device layer tothe carrier substrate may include bonding the stabilization layer to thecarrier substrate. The stabilization layer may be soft-baked prior tobonding the stabilization layer to the carrier substrate, followed byhard-baking during or after bonding the stabilization layer to thecarrier substrate. A growth substrate may also be removed from thedevice layer after bonding the stabilization layer to the carriersubstrate and prior to patterning the device layer to form the array ofmicro devices. In an embodiment, a conductive contact layer is depositedover the device layer after removing the growth substrate, theconductive contact layer is annealed to form an ohmic contact with thedevice layer, and patterned to form an array of conductive contacts onthe device layer directly over the array of stabilization posts. Forexample, annealing may be performed at a temperature of 300° C. orgreater.

In an embodiment, a method includes patterning a sacrificial layer toform an array of openings in the sacrificial layer exposing an array ofconductive contacts formed on a device layer, where the device layerincludes an n-doped semiconductor layer, a p-doped semiconductor layer,and a quantum well layer between the n-doped semiconductor layer and thep-doped semiconductor layer. A thermosetting material is then appliedover the sacrificial layer and within the array of openings, and thethermosetting material is cured to solidify the thermosetting material.Curing may be performed by either UV energy or heat. Curing may alsoachieve at least 70% cross-linking of the thermosetting material. Thethermosetting material may additionally undergo 10% or less volumeshrinkage during curing. In an embodiment, a growth substrate supportingthe device layer may be bonded to a carrier substrate with the curedthermosetting material. In an embodiment, patterning the sacrificiallayer and an etch stop detection layer underneath the sacrificial layerare patterned to form the array of openings exposing the array ofconductive contacts. In an embodiment, completion of etching through theetch stop detection layer is detection with visual observation.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a cross-sectional side view illustration of a patternedconductive contact layer on a bulk LED substrate in accordance with anembodiment of the invention.

FIG. 1B is a cross-sectional side view illustration of a patternedconductive contact layer on a bulk LED substrate in accordance with anembodiment of the invention.

FIG. 2 is a cross-sectional side view illustration of a sacrificiallayer formed over a bulk LED substrate in accordance with an embodimentof the invention.

FIGS. 3A-3D are cross-sectional side view illustrations of a patternedsacrificial layer formed over a bulk LED substrate in accordance withembodiments of the invention.

FIG. 4A is a cross-sectional side view illustration of a stabilizationlayer formed over and within openings in a patterned sacrificial layer abulk LED substrate in accordance with an embodiment of the invention.

FIG. 4B is a cross-sectional side view illustration of a moldedstabilization layer formed over and within openings in a patternedsacrificial layer a bulk LED substrate in accordance with an embodimentof the invention.

FIGS. 5A-5B are cross-sectional side view illustrations of bringingtogether a bulk LED substrate and a carrier substrate in accordance withembodiments of the invention.

FIG. 5C is a cross-sectional side view illustration of a bulk LEDsubstrate bonded to a carrier substrate in accordance with an embodimentof the invention.

FIG. 6 is a cross-sectional side view illustration of the removal of agrowth substrate in accordance with an embodiment of the invention.

FIG. 7 is a cross-sectional side view illustration of the removal of anetch stop layer in accordance with an embodiment of the invention.

FIGS. 8A-8B are cross-sectional side view illustrations of a patternedconductive contact layer formed over a device layer in accordance withembodiments of the invention.

FIG. 9 is a cross-sectional side view illustration of an array of microLED devices formed on an array of stabilization posts in accordance withan embodiment of the invention.

FIGS. 10A-10B are cross-sectional side view illustration of an array ofmicro LED devices formed on an array of stabilization posts afterremoval of the sacrificial layer in accordance with embodiments of theinvention.

FIG. 10C is a top view image of a stabilization layer includingstabilization posts after an array of micro devices have been picked upin accordance with an embodiment of the invention.

FIG. 11A is cross-sectional side view illustration of an array of microLED devices formed on an array of stabilization posts after removal ofthe sacrificial layer in accordance with an embodiment of the invention.

FIG. 11B is a schematic top view illustration of stabilization postlocation in accordance with embodiments of the invention.

FIG. 12A is cross-sectional side view illustration of an array of microLED devices formed on an array of stabilization posts after removal ofthe sacrificial layer in accordance with an embodiment of the invention.

FIG. 12B is a schematic top view illustration of stabilization postlocation in accordance with embodiments of the invention.

FIG. 13A is cross-sectional side view illustration of an array of microLED devices formed on an array of stabilization posts after removal ofthe sacrificial layer in accordance with an embodiment of the invention.

FIG. 13B is a schematic top view illustration of stabilization postlocation in accordance with embodiments of the invention.

FIG. 14A is a cross-sectional side view illustration of an array ofelectrostatic transfer heads positioned over an array of micro deviceson a carrier substrate in accordance with an embodiment of theinvention.

FIG. 14B is a cross-sectional side view illustration of an array ofelectrostatic transfer heads in contact with an array of micro devicesin accordance with an embodiment of the invention.

FIG. 14C is a cross-sectional side view illustration of an array ofelectrostatic transfer heads picking up an array of micro devices inaccordance with an embodiment of the invention.

FIG. 14D is a cross-sectional side view illustration of an array ofmicro devices released onto a receiving substrate in accordance with anembodiment of the invention.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of the present invention describe a method and structure forstabilizing an array of micro devices such as micro light emitting diode(LED) devices on a carrier substrate so that they are poised for pick upand transfer to a receiving substrate. For example, the receivingsubstrate may be, but is not limited to, a display substrate, a lightingsubstrate, a substrate with functional devices such as transistors orintegrated circuits (ICs), or a substrate with metal redistributionlines. While embodiments of the present invention are described withspecific regard to micro LED devices comprising p-n diodes, it is to beappreciated that embodiments of the invention are not so limited andthat certain embodiments may also be applicable to other microsemiconductor devices which are designed in such a way so as to performin a controlled fashion a predetermined electronic function (e.g. diode,transistor, integrated circuit) or photonic function (LED, laser).

In various embodiments, description is made with reference to figures.However, certain embodiments may be practiced without one or more ofthese specific details, or in combination with other known methods andconfigurations. In the following description, numerous specific detailsare set forth, such as specific configurations, dimensions andprocesses, etc., in order to provide a thorough understanding of thepresent invention. In other instances, well-known semiconductorprocesses and manufacturing techniques have not been described inparticular detail in order to not unnecessarily obscure the presentinvention. Reference throughout this specification to “one embodiment,”“an embodiment” or the like means that a particular feature, structure,configuration, or characteristic described in connection with theembodiment is included in at least one embodiment of the invention.Thus, the appearances of the phrase “in one embodiment,” “an embodiment”or the like in various places throughout this specification are notnecessarily referring to the same embodiment of the invention.Furthermore, the particular features, structures, configurations, orcharacteristics may be combined in any suitable manner in one or moreembodiments.

The terms “over”, “to”, “between” and “on” as used herein may refer to arelative position of one layer with respect to other layers. One layer“over” or “on” another layer or bonded “to” another layer may bedirectly in contact with the other layer or may have one or moreintervening layers. One layer “between” layers may be directly incontact with the layers or may have one or more intervening layers.

The terms “micro” device or “micro” LED device as used herein may referto the descriptive size of certain devices or structures in accordancewith embodiments of the invention. As used herein, the terms “micro”devices or structures are meant to refer to the scale of 1 to 100 μm.However, it is to be appreciated that embodiments of the presentinvention are not necessarily so limited, and that certain aspects ofthe embodiments may be applicable to larger, and possibly smaller sizescales. In an embodiment, a single micro device in an array of microdevices, and a single electrostatic transfer head in an array ofelectrostatic transfer heads both have a maximum dimension, for examplelength or width, of 1 to 100 μm. In an embodiment, the top contactsurface of each micro device or electrostatic transfer head has amaximum dimension of 1 to 100 μm, or more specifically 3 to 10 μm. In anembodiment, a pitch of an array of micro devices, and a correspondingarray of electrostatic transfer heads is (1 to 100 μm) by (1 to 100 μm),for example a 10 μm by 10 μm pitch or 5 μm by 5 μm pitch.

In the following embodiments, the mass transfer of an array ofpre-fabricated micro devices with an array of transfer heads isdescribed. For example, the pre-fabricated micro devices may have aspecific functionality such as, but not limited to, a LED forlight-emission, silicon IC for logic and memory, and gallium arsenide(GaAs) circuits for radio frequency (RF) communications. In someembodiments, arrays of micro LED devices which are poised for pick upare described as having a 10 μm by 10 μm pitch, or 5 μm by 5 μm pitch.At these densities a 6 inch substrate, for example, can accommodateapproximately 165 million micro LED devices with a 10 μm by 10 μm pitch,or approximately 660 million micro LED devices with a 5 μm by 5 μmpitch. A transfer tool including an array of transfer heads matching aninteger multiple of the pitch of the corresponding array of micro LEDdevices can be used to pick up and transfer the array of micro LEDdevices to a receiving substrate. In this manner, it is possible tointegrate and assemble micro LED devices into heterogeneously integratedsystems, including substrates of any size ranging from micro displays tolarge area displays, and at high transfer rates. For example, a 1 cm by1 cm array of micro device transfer heads can pick up and transfer morethan 100,000 micro devices, with larger arrays of micro device transferheads being capable of transferring more micro devices.

In one aspect, embodiments of the invention describe a structure forstabilizing an array of micro devices such as micro light emitting diode(LED) devices on a carrier substrate so that they are poised for pick upand transfer to a receiving substrate. In an embodiment, an array ofmicro devices are held in place on an array of stabilization posts on acarrier substrate. In an embodiment, the stabilization posts are formedof an adhesive bonding material. In this manner, the array ofstabilization posts may retain the array of micro devices in place on acarrier substrate while also providing a structure from which the arrayof micro devices are readily picked up. In an embodiment, the adhesivebonding material includes a thermoset material such as, but not limitedto, benzocyclobutene (BCB) or epoxy. In an embodiment, the thermosetmaterial may be associated with 10% or less volume shrinkage duringcuring, or more particularly about 6% or less volume shrinkage duringcuring. In this manner low volume shrinkage during curing of theadhesive bonding material may not cause delamination between the arrayof stabilization posts and the array of micro devices, and may allow foruniform adhesion between the array stabilization posts and the array ofmicro devices supported by the array of stabilization posts.

Without being limited to a particular theory, embodiments of theinvention utilize transfer heads and head arrays which operate inaccordance with principles of electrostatic grippers, using theattraction of opposite charges to pick up micro devices. In accordancewith embodiments of the present invention, a pull-in voltage is appliedto a transfer head in order to generate a grip pressure on a microdevice and pick up the micro device. In accordance with embodiments ofthe invention, the minimum amount pick up pressure required to pick up amicro device from a stabilization post can be determined by the adhesionstrength between the adhesive bonding material from which thestabilization posts are formed and the micro device (or any intermediatelayer), as well as the contact area between the top surface of thestabilization post and the micro device. For example, adhesion strengthwhich must be overcome to pick up a micro device is related to theminimum pick up pressure generated by a transfer head as provided inequation (1):

P ₁ A _(i) =P ₂ A ₂   (1)

where P₁ is the minimum grip pressure required to be generated by atransfer head, A₁ is the contact area between a transfer head contactsurface and micro device contact surface, A₂ is the contact area on atop surface of a stabilization post, and P₂ is the adhesion strength onthe top surface of a stabilization post. In an embodiment, a grippressure of greater than 1 atmosphere is generated by a transfer head.For example, each transfer head may generate a grip pressure of 2atmospheres or greater, or even 20 atmospheres or greater withoutshorting due to dielectric breakdown of the transfer heads. Due to thesmaller area, a higher pressure is realized at the top surface of thecorresponding stabilization post than the grip pressure generate by atransfer head.

In an embodiment, a bonding layer which is remeltable or reflowable isplaced between each micro device and stabilization post. In such anembodiment, heat can be applied to the bonding layer to create a phasechange from solid to liquid state prior to or during the pick upoperation, or during placement of the micro device on the receivingsubstrate. In the liquid state the bonding layer may retain the microdevice in place on the stabilization post while also providing a mediumfrom which the micro device is readily releasable. In this circumstancethe surface tension forces of the liquid bonding layer holding the microdevice to the stabilization post may become dominant over other forcesholding the micro device. These surface tension forces may becomparatively less than adhesion forces associated with the adhesivebonding material in the stabilization posts, and therefore require lessgrip pressure for pick up. Partial pick up and transfer of the bondinglayer to the receiving substrate may also assist in bonding the microdevice to the receiving substrate.

In another embodiment, the bonding layer is formed of a materialcharacterized by a low tensile strength. For example, indium ischaracterized by a tensile strength of approximately 4 MPa which can beless than or near the adhesion strength between a gold/BCB bondinginterface of 10 MPa or less, and which is significantly lower than anexemplary 30 MPa adhesion strength between a gold/BCB bonding interface(determined with stud pull test) when treated with adhesion promoterAP3000, an organosilane compound in 1-methoxy-2-propoanol available fromThe Dow Chemical Company. In an embodiment, the bonding layer is cleavedduring the pick up operation due to the lower tensile strength, and aphase change is not created curing the pick up operation. Though, aphase change may still be created in the portion of the bonding layerwhich is picked up with the micro device during placement of the microdevice onto a receiving substrate to aid in bonding of the micro deviceto the receiving substrate.

In another aspect, embodiments of the invention describe a manner offorming an array of micro devices which are poised for pick up in whichconductive contact layers can be formed on top and bottom surfaces ofthe micro devices, and annealed to provide ohmic contacts. Where aconductive contact is formed on a top surface of a micro device, thestabilization layer is formed of a material which is capable ofwithstanding the associated deposition and annealing temperatures. Forexample, a conductive contact may require annealing at temperaturesbetween 200° C. to 350° C. to form an ohmic contact with the microdevice. In this manner, embodiments of the invention may be utilized toform arrays of micro LED devices based upon a variety of differentsemiconductor compositions for emitting various different visiblewavelengths. For example, micro LED growth substrates including activedevices layers formed of different materials for emitting differentwavelengths (e.g. red, green, and blue wavelengths) can all be processedwithin the general sequence of operations of the embodiments.

FIG. 1A is a cross-sectional side view illustration of a patternedconductive contact layer on a bulk LED substrate in accordance with anembodiment of the invention. Specifically, the bulk LED substrateillustrated in FIG. 1A is a bulk LED substrate designed for emission ofred light (e.g. 620-750 nm wavelength). It is to be appreciated, thatwhile the specific embodiments illustrated and described in thefollowing description are made with reference to the formation of redemitting LED devices, that the following sequences and descriptions arealso applicable to the formation of other LED devices such as greenemitting LED devices (e.g. 495-570 nm wavelength) formed of materialssuch as indium gallium nitride (InGaN), gallium nitride (GaN), galliumphosphide (GaP), aluminum gallium indium phosphide (AlGaInP), andaluminum gallium phosphide (AlGaP), or blue emitting LED devices (e.g.450-495 nm wavelength) formed of materials such as gallium nitride(GaN), indium gallium nitride (InGaN), and zinc selenide (ZnSe).

In an embodiment, a bulk LED substrate 100 includes a device layer 105formed on a growth substrate 102. An optional etch stop layer 104 may beformed between the device layer 105 and the growth substrate to aid inthe subsequent removal of the growth substrate 102. The device layer 105may include a doped semiconductor layer 108 (e.g. n-doped), one or morequantum well layers 110, and a doped semiconductor layer 112 (e.g.p-doped). The device layer 105 may optionally including an ohmic layer106 between the doped semiconductor layer 108 and the growth substrate102 to aid in the subsequent formation of an ohmic contact with thedevice layer. The etch stop layer 104 and device layer 105 may be formedon the growth substrate 102 by a variety of techniques. In anembodiment, the etch stop layer 104 and device layer 105 are formed byone or more heterogeneous epitaxial growth techniques. A conductivecontact layer may then be formed over the bulk LED substrate devicelayer 105 using a suitable technique such as sputtering or electron beamphysical deposition followed by etching or liftoff to form the array ofconductive contacts 120.

In the particular embodiment illustrated the growth substrate 102 isformed of GaAs, and may be approximately 500 μm thick. The etch stoplayer 104 may be formed of InGaP and approximately 2,000 angstromsthick. The ohmic layer 106 may be formed of GaAs and approximately 500angstroms thick. In an embodiment, n-doped layer 108 is formed ofAlGaInP, and is approximately 1 μm to 3 μm thick. The one or morequantum well layers 110 may have a thickness of approximately 0.5 μm. Inan embodiment, p-doped layer 112 is formed of GaP, and is approximately1 μm to 2 μm thick.

In an embodiment, the array of conductive contacts 120 have a thicknessof approximately 0.1 μm-2 μm, and may include a plurality of differentlayers. For example, a conductive contact 120 may include an electrodelayer 121 for ohmic contact, a minor layer 122, an adhesion/barrierlayer 123, a diffusion barrier layer 125, and a bonding layer 125. In anembodiment, electrode layer 121 may make ohmic contact to the p-dopedGaP layer 112, and may be formed of a high work-function metal such asnickel. In an embodiment, a minor layer 122 such as silver is formedover the electrode layer 121 to reflect the transmission of the visiblewavelength. In an embodiment, titanium is used as an adhesion/barrierlayer 123, and platinum is used as a diffusion barrier 124 to bondinglayer 125. Bonding layer 125 may be formed of a variety of materialswhich can be chosen for bonding to the receiving substrate and/or toachieve the requisite tensile strength or adhesion or surface tensionwith the stabilization posts. Following the formation of layers 121-125,the substrate stack can be annealed to form an ohmic contact. Forexample, a p-side ohmic contact may be formed by annealing the substratestack at 510° C. for 10 minutes.

In an embodiment, bonding layer 125 is formed of a conductive material(both pure metals and alloys) which can diffuse with a metal forming acontact pad on a receiving substrate (e.g. gold, indium, or tin contactpad) and has a liquidus temperature above 200° C. such as tin (231.9°C.) or bismuth (271.4° C.), or a liquidus temperature above 300° C. suchas gold (1064° C.) or silver (962° C.). In some embodiments, bondinglayer 125 such as gold may be selected for its poor adhesion with theadhesive bonding material used to form the stabilization posts. Forexample, noble metals such as gold are known to achieve poor adhesionwith BCB. In this manner, sufficient adhesion is created to maintain thearray of micro LED devices on the stabilization posts during processingand handling, as well as to maintain adjacent micro LED devices in placewhen another micro LED device is being picked up, yet also not createtoo much adhesion so that pick up can be achieved with an applied pickup pressure on the transfer head of 20 atmospheres or less, or moreparticularly 5-10 atmospheres.

In the embodiment illustrated in FIG. 1A, where bonding layer 125 has aliquidus temperature above the annealing temperature for forming thep-side ohmic contact, the anneal (eg. 510° C. for 10 minutes) can beperformed after the formation of the patterned conductive contact layer120, including bonding layer 125. Where bonding layer 125 has a liquidustemperature below the annealing temperature for forming the p-side ohmiccontact, the bonding layer 125 may be formed after annealing.

FIG. 1B is a cross-sectional side view illustration similar to that ofFIG. 1A of a patterned conductive contact layer on a bulk LED substratein accordance with an embodiment of the invention. The embodimentillustrated in FIG. 1B may be particularly useful where bonding layer125 is formed of a material with a liquidus temperature below theannealing temperature of the p-side ohmic contact or n-side ohmiccontact yet to be formed, though the embodiment illustrated in FIG. 1Bis not limited to such and may be used where the bonding layer 125 isformed of a material with a liquidus temperature above the annealingtemperature of the p-side ohmic contact or n-side ohmic contact yet tobe formed. In such embodiments, electrode layer 121 and mirror layer 122may be formed similarly as described with regard to FIG. 1A Likewise,adhesion/barrier layer 123 and diffusion barrier 124 may be formedsimilarly as described with regard to FIG. 1A with one difference beingthat the layers 123, 124 may optionally wrap around the sidewalls of thelayers 121, 122. Following the formation of layers 121-124, thesubstrate stack can be annealed to form an ohmic contact. For example, ap-side ohmic contact may be formed by annealing the substrate stack at510° C. for 10 minutes. After annealing layer 121-124 to form the p-sideohmic contact, the bonding layer 125 may be formed. In an embodiment,the bonding layer 125 has a smaller width than for layers 121-124.

In an embodiment, bonding layer 125 has a liquidus temperature ormelting temperature of approximately 350° C. or lower, or morespecifically of approximately 200° C. or lower. At such temperatures thebonding layer may undergo a phase change without substantially affectingthe other components of the micro LED device. In an embodiment, theresultant bonding layer may be electrically conductive. In accordancewith some embodiments, the bonding layer 125 may be a solder material,such as an indium, bismuth, or tin based solder, including pure metalsand metal alloys. In an particular embodiment, the bonding layer 125 isindium.

Referring now to FIG. 2 a sacrificial layer 140 is formed over the bulkLED substrate 100 and array of conductive contacts 120 in accordancewith an embodiment of the invention. In an embodiment, sacrificial layer140 is between approximately 0.5 and 2 microns thick. In an embodiment,sacrificial layer is formed of an oxide (e.g. SiO₂) or nitride (e.g.Si₃N₄), though other materials may be used which can be selectivelyremoved with respect to the other layers. In an embodiment, sacrificiallayer 140 is deposited by sputtering, low temperature plasma enhancedchemical vapor deposition (PECVD), or electron beam evaporation tocreate a low quality layer, which may be more easily removed than ahigher quality layer deposited by other methods such as atomic layerdeposition (ALD) or high temperature PECVD.

Still referring to FIG. 2, prior to the formation of sacrificial layer140, an etch stop detection layer 130 may be formed. In an embodiment,etch stop detection layer 140 is titanium. Etch stop detection layer 140may be formed by a variety of techniques such as sputtering or electronbeam evaporation, and have a suitable thickness for visual observationduring etching, for example, 100-300 angstroms.

After the formation of sacrificial layer 140, an adhesion promoter layer144 may be formed in order to increase adhesion of the stabilizationlayer 150 (not yet formed) to the sacrificial layer 140. Increase ofadhesion between the sacrificial layer 140 and the stabilization layer150 may prevent delamination between the layers due to the stress of thedevice layer 105 resulting from heterogeneous epitaxial growth of devicelayer 105. A thickness of 100-300 angstroms may be sufficient toincrease adhesion.

Specific metals that have good adhesion to both the sacrificial layer140 and a BCB stabilization layer include, but are not limited to,titanium and chromium. For example, sputtered or evaporated titanium orchromium can achieve an adhesion strength (stud pull) of greater than 40MPa with BCB.

Referring now to FIG. 3A, the sacrificial layer 140 is patterned to forman array of openings 142 over the array of conductive contacts 120 inaccordance with an embodiment of the invention. If adhesion layer 144,and/or etch stop detection layer 140 are present these layers may alsobe patterned to form the array of openings 142 through layers 144, 140,130, exposing the array of conductive contacts 120. In accordance withembodiments of the invention, a SiO₂ or Si₃N₄ sacrificial layer 140 maybe transparent, and endpoint etch detection cannot be easily determinedwith visual observation. Where a titanium etch stop detection layer 130is present, a grayish color indicative of titanium can be visuallyobserved during etching of the SiO₂ or Si₃N₄ sacrificial layer 140. Thesame etching chemistry (e.g. HF vapor, or BCl₃ and Cl₂ plasma) used toetch the SiO₂ or Si₃N₄ sacrificial layer 140 also etches through thetitanium etch stop detection layer 130. Upon etching through layer 130,the grayish color associated with titanium disappears and the color ofthe underlying bonding layer 125 (e.g. gold) on the conductive contact120 is visible. In this manner, the stop detection layer 130 allows forsmall post opening process inspection to ensure complete and uniformopenings 142.

As will become more apparent in the following description the height,and length and width of the openings 142 in the sacrificial layer 140correspond to the height, and length and width (area) of thestabilization posts to be formed, and resultantly the adhesion strengththat must be overcome to pick up the array of micro LED devices poisedfor pick up on the array of stabilization posts. In an embodiment,openings 142 are formed using lithographic techniques and have a lengthand width of approximately 1 μm by 1 μm, though the openings may belarger or smaller so long as the openings have a width (or area) that isless than the width (or area) of the conductive contacts 120 and/ormicro LED devices yet to be formed.

FIG. 3B is an illustration of an array of openings 142 over the array ofconductive contacts 120 in which the array of openings 142 areoff-centered from an x-y center for the corresponding array ofconductive contacts 120, in accordance with an embodiment. As willbecome more apparent in the following description, the stabilizationposts created in the off-centered openings 142 will also be off-centeredfrom the corresponding micro devices. FIG. 3C is an illustration ofmultiple openings 142 formed over a single conductive contact 120 inaccordance with an embodiment. For example, the multiple openings 142may be at opposite corners of a conductive contact 120. FIG. 3D is anillustration of openings 142 spanning over and between the edges of twoconductive contacts 120 in accordance with an embodiment. As will becomemore apparent in the following description, the stabilization postscreated in the openings 142 span underneath and between two conductivecontacts 120, and each conductive contact can be supported by more thanone stabilization post.

In accordance with embodiments of the invention, a stabilization layer150 formed of an adhesive bonding material is then formed over thepatterned sacrificial layer 140, as illustrated in FIG. 4A. Inaccordance with some embodiments, the adhesive bonding material is athermosetting material such as benzocyclobutene (BCB) or epoxy. In anembodiment, the thermosetting material may be associated with 10% orless volume shrinkage during curing, or more particularly about 6% orless volume shrinkage during curing so as to not delaminate from theconductive contacts 120 on the micro devices to be formed. In order toincrease adhesion to the underlying structure, in addition to, or inalternative to adhesion promoter layer 144, the underlying structure canbe treated with an adhesion promoter such as AP3000, available from TheDow Chemical Company, in the case of a BCB stabilization layer in orderto condition the underlying structure. AP3000, for example, can be spincoated onto the underlying structure, and soft-baked (e.g. 100° C.) orspun dry to remove the solvents prior to applying the stabilizationlayer 150 over the patterned sacrificial layer 140.

In an embodiment, stabilization layer 150 is spin coated or spray coatedover the patterned sacrificial layer 140, though other applicationtechniques may be used. Following application of the stabilization layer150, the stabilization may be pre-baked to remove the solvents. In anembodiment, the stabilization layer 150 is thicker than the height ofopenings 142 in the patterned sacrificial layer 140. In this manner, thethickness of the stabilization layer filling openings 142 will becomestabilization posts 152, and the remainder of the thickness of thestabilization layer 150 over the filled openings 142 can function toadhesively bond the bulk LED substrate 100 a carrier substrate.

In accordance with another embodiment illustrated in FIG. 4B, thestabilization layer 150 can be formed over the patterned sacrificiallayer 140 using a molding technique such as injection molding. In suchan embodiment, the stabilization layer 150 may be fully cured duringinjection molding. The stabilization layer 150 may also be substantiallythick so as to function as a carrier substrate.

Referring now to the embodiments illustrated in FIG. 5A-5C a bulk LEDsubstrate illustrated in FIG. 4A is bonded to a carrier substrate 160(such as silicon) with stabilization layer 150. In the embodimentillustrated in FIG. 5A, a stabilization layer 150 is applied over thesurface of the bulk LED substrate. Alternatively or additionally, in theembodiment illustrated in FIG. 5B, a stabilization layer 150 is appliedover the surface of the carrier substrate 160. Depending upon theparticular material selected, stabilization layer 150 may be thermallycured, or cured with application of UV energy.

In order to increase adhesion with the stabilization layer 150 anadhesion promoter layer 162 can be applied to the carrier substrate 160prior to bonding the bulk LED substrate 100 to the carrier substrate 160similarly as described above with regard to adhesion promoter layer 144.Likewise, in addition to, or in alternative to adhesion promoter layer144, an adhesion promoter such as AP3000 may be applied to the surfaceof the carrier substrate 160 or adhesion promoter layer 162.

In an embodiment, a stabilization layer 150 is cured at a temperature ortemperature profile ranging between 150° C. and 300° C. Wherestabilization layer 150 is formed of BCB, curing temperatures should notexceed approximately 350° C., which represents the temperature at whichBCB begins to degrade. In accordance with embodiments including abonding layer 125 material characterized by a liquidus temperature (e.g.gold, silver, bismuth) greater than 250° C., full-curing of a BCBstabilization layer 150 can be achieved in approximately 1 hour or lessat a curing temperature between 250° C. and 300° C. Other bonding layer125 materials such as Sn (231.9° C.) may require between 10-100 hours tofully cure at temperatures between 200° C. and the 231.9° C. liquidustemperature. In accordance with embodiments including a bonding layer125 material characterized by a liquidus temperature below 200° C. (e.g.indium), a BCB stabilization layer 150 may only be partially cured (e.g.70% or greater). In such an embodiment the BCB stabilization layer 150may be cured at a temperature between 150° C. and the liquidustemperature of the bonding layer (e.g. 156.7° C. for indium) forapproximately 100 hours to achieve at least a 70% cure.

Achieving a 100% full cure of the stabilization layer is not required inaccordance with embodiments of the invention. More specifically, thestabilization layer 150 may be cured to a sufficient curing percentage(e.g. 70% or greater for BCB) at which point the stabilization layer 150will no longer reflow. Moreover, it has been observed that suchpartially cured (e.g. 70% or greater) BCB stabilization layer 150 maypossess sufficient adhesion strengths with the carrier substrate 160 andpatterned sacrificial layer 140 (or any intermediate layer(s)).Accordingly, regardless of bonding layer 125 material, in an embodimentthe stabilization layer is cured between 70% and fully cured and needonly be cured sufficiently to resist the HF vapor etch release processdescribed below with regard to FIGS. 10A-13B.

Referring now to FIG. 6, removal of the growth substrate 102 isillustrated in accordance with an embodiment of the invention. Removalmay be accomplished by a variety of methods including laser lift off(LLO), grinding, and etching depending upon the material selection ofthe growth substrate 102. In the particular embodiment illustrated wheregrowth substrate 102 is formed of GaAs, removal may be accomplished byetching, or a combination of grinding and selective etching, with theselective etching stopping on an etch stop layer 104. For example, theGaAs growth substrate 102 can be removed with a H₂SO₄+H₂O₂ solution,NH₄OH+H₂O₂ solution, or CH₃OH+Br₂ chemistry, stopping on etch stop layer104 formed of InGaP, for example. The etch stop layer 104 may then beremoved to expose the ohmic layer 106, as illustrated in FIG. 7. In anembodiment where etch stop layer is formed of InGaP, the etch stop layermay be removed by wet etching in a solution of HCl+H₃PO₄.

Referring now to the embodiments illustrated in FIGS. 8A-8B a conductivecontact layer 170 is formed over the device layer 105. In the particularembodiments illustrated conductive contact layer 170 is formed on ohmiclayer 106. Conductive contact layer 170 may be formed of a variety ofconductive materials including metals, conductive oxides, and conductivepolymers. In an embodiment, conductive contact layer 170 is formed usinga suitable technique such as sputtering or electron beam physicaldeposition. For example, conductive contact layer 170 may include BeAumetal alloy, or a metal stack of Au/GeAuNi/Au layers. Conductive contactlayer 170 may also be indium-tin-oxide (ITO). Conductive contact layercan also be a combination of one or more metal layers and a conductiveoxide. In an embodiment, after forming the conductive contact layer 170,the substrate stack is annealed to generate an ohmic contact betweenconductive contact layer 170 and ohmic layer 106. Where thestabilization layer is formed of BCB, the annealing temperature may bebelow approximately 350° C., at which point BCB degrades. In anembodiment, annealing is performed between 200° C. and 350° C., or moreparticularly at approximately 320° C. for approximately 10 minutes.

In an embodiment a bonding layer 125 material (e.g. indium) ischaracterized by a liquidus temperature below the annealing temperatureto generate the ohmic contact. In such an embodiment, the bonding layer125 may be encapsulated by the cured stabilization layer 150,sacrificial layer 140, and the diffusion/barrier layers 124, 123 asillustrated in FIG. 8B. Further, even if the stabilization layer 150 isnot already fully cured, the stabilization layer 150 may rapidly cureduring anneal and encapsulate the liquefied bonding layer 125. In anembodiment, the etch stop detection layer 130 (if present) and bondinglayer 125 materials are selected, along with anneal time and temperatureso that minimal diffusion of materials occurs so that the meltingtemperature of bonding layer 125 is not significantly raised (e.g. above350° C.). In an embodiment, the etch stop detection layer is not presentif the bonding layer 125 has a liquidus temperature below the annealingtemperature to generate ohmic contact. As described above, embodimentsdescribe a manner of transfer of an array of micro devices that arepoised for pick up on a carrier substrate to a receiving substrate.Where elevated temperatures are associated with the transfer process toliquefy a bonding layer material, these elevated temperatures may affectalignment of the electrostatic transfer head assembly. Accordingly, inan embodiment the liquidus temperature of the bonding layer material ismaintained below 350° C. while on the carrier substrate.

Referring now to FIG. 9, the conductive contact layer 170 and devicelayer 105 layers 106, 108, 110, 112 are patterned and etched to form anarray of laterally separate micro devices 175. At this point, theresultant structure still robust for handling and cleaning operations toprepare the substrate for subsequent sacrificial layer removal andelectrostatic pick up. In an exemplary embodiment where the array ofmicro devices have a pitch of 5 microns, each micro device may have aminimum width (e.g. along the top surface of layer 170) of 4.5 μm, and aseparation between adjacent micro devices of 0.5 μm. It is to beappreciated that a pitch of 5 microns is exemplary, and that embodimentsof the invention encompass any pitch of 1 to 100 μm as well as larger,and possibly smaller pitches. Etching of layers 170, 106, 108, 110, and112 may be accomplished using suitable etch chemistries for theparticular materials. For example, AlGaInP n-doped layer 108, quantumwell layer(s) 110 a GaP, and p-doped layer 112 may be dry etched in oneoperation with a BCl₃ and Cl₂ chemistry stopping on the sacrificiallayer 140.

If an etch stop detection layer 130 is present, the etching chemistryused for etching through the device layers 105 may also remove the etchstop detection layer 130. Etch stop detection through the device layer105 may be visually detected with an optical microscope when etch stopdetection layer 130 is present. In the particular embodimentillustrated, the device layer 105 for a red LED may be exhibit an opaqueorange/red/yellow color variation. Once the device layer 105 is etchedthrough the grayish color of a titanium etch stop detection layer 130may flash across the wafer, providing an indication that etching throughthe device layer 105 is complete. If the titanium etch stop detectionlayer 130 is etched through, the appearance of the non-transparentadhesion layer(s) 144, 162 (e.g Cr, Ti) or substrate 160 (e.g. Si) maythen be observed if the sacrificial layer 140 and stabilization layer150 are transparent.

Following the formation of laterally separate micro devices 175, thesacrificial layer 140 may be removed. FIGS. 10A-10B are cross-sectionalside view illustration of an array of micro LED devices formed on anarray of stabilization posts after removal of the sacrificial layer inaccordance with embodiments of the invention. FIGS. 10A and 10B aresubstantially similar, with the only difference being the arrangement oflayers within conductive contacts 120. In the embodiments illustrated,sacrificial layer 140 is completely removed resulting in an open space146 below each micro device 175. A suitable etching chemistry such as(e.g. HF vapor, or BCl₃ and Cl₂ plasma) used to etch the SiO₂ or Si₃N₄sacrificial layer 140 also removes the titanium etch stop detectionlayer 130 if present.

In an embodiment, the array of micro devices 175 are on the array ofstabilization posts 152, and supported only by the array ofstabilization posts 152. In addition, the top surface of stabilizationlayer 150 may include a cavity 154 with a width corresponding to theapproximate width of conductive contact 120. The cavity 154 may act tocontain bonding layer 125 if the bonding layer is liquefied during apick up operation and help prevent the spreading of the bonding layer125 to an adjacent micro device 175.

FIG. 10C is a top view image of a stabilization layer includingstabilization posts after an array of micro devices have been picked upin accordance with an embodiment of the invention. As shown, the arrayof stabilization posts 152 are centered in the x-y directions in thecavities 154. As described above, the cavities have a width in the x-ydirections corresponding to the approximate width of conductive contact120. Thus, in the embodiments illustrated in FIGS. 10A-10C, the array ofstabilization posts are centered beneath the array of micro devices 175.

Referring now to FIG. 11A, a cross-sectional side view illustration ofan array of micro LED devices is provided after the removal of thesacrificial layer in accordance with an embodiment. In particular, thearray of stabilization posts 152 are off-centered from an x-y center forthe corresponding array of conductive contacts 120 of the array of microLED devices 175. For example, the particular structure illustrated inFIG. 11A may be formed using the array of openings 142 described abovewith regard to FIG. 3B.

FIG. 11B is a schematic top view illustration of a stabilization postlocation in accordance with embodiments of the invention. As shown, thestabilization post 152 is off-centered from an x-y center for thecorresponding cavity 154, which corresponds to the approximate size ofconductive contact 120. Thus, in the embodiments illustrated in FIGS.11A-11B, the array of stabilization posts are off-centered from an x-ycenter below the array of micro devices 175. In an embodiment, duringthe pick up operation described below the off-centered stabilizationposts 152 may provide for the creation of a moment when the array oftransfer heads contact the array of micro devices in which the microdevices tilt slightly as a result of the applied downward pressure fromthe array of transfer heads. This slight tilting may aid in overcomingthe adhesion strength between the stabilization posts 152 and the arrayof micro devices 175. Furthermore, such assistance in overcoming theadhesion strength may potentially allow for picking up the array ofmicro devices with a lower grip pressure. Consequently, this may allowfor operation of the array of transfer heads at a lower voltage, andimpose less stringent dielectric strength requirements in the dielectriclayer covering each transfer head required to achieve the electrostaticgrip pressure.

Referring now to FIG. 12A, a cross-sectional side view illustration ofan array of micro LED devices is provided after the removal of thesacrificial layer in accordance with an embodiment. In particular, twoor more stabilization posts 152 are allocated for each correspondingconductive contact 120 in the array of micro LED devices 175. In anembodiment, each conductive contact 120 is associated with twostabilization posts 152, at opposite corners of the conductive contact.For example, the particular structure illustrated in FIG. 12A may beformed using the array of openings 142 described with regard to FIG. 3C.

FIG. 12B is a schematic top view illustration of stabilization postlocations in accordance with embodiments of the invention. As shown, thestabilization posts 152 are at opposite corners of the correspondingcavity 154, which corresponds to the approximate size of conductivecontact 120. Thus, in the embodiments illustrated in FIGS. 12A-12B, thearray of stabilization posts 152 are off-centered from an x-y centerbelow the array of micro devices 175. In an embodiment, during the pickup operation described below the off-centered stabilization posts 152may provide for the creation of a moment when the array of transferheads contact the array of micro devices in which the micro devices tiltslightly as a result of the applied downward pressure from the array oftransfer heads. In an embodiment, supporting a micro device 175 withmore than one stabilization post 152 may allow for the formation ofsmaller stabilization posts, which may also reduce the amount of contactarea between the stabilization posts 152 and the micro devices 175, andreduce the total adhesion strength required to be overcome during thepick up operation.

Referring now to FIG. 13A, a cross-sectional side view illustration ofan array of micro LED devices is provided after the removal of thesacrificial layer in accordance with an embodiment. In particular,stabilization posts 152 span underneath and between the edges of twoadjacent conductive contacts 120. For example, the particular structureillustrated in FIG. 13A may be formed using the array of openings 142described with regard to FIG. 3D. While not illustrated in FIG. 13A,each conductive contact 120 can be supported by more than onestabilization post 152.

FIG. 13B is a schematic top view illustration of stabilization postlocations in accordance with embodiments of the invention. As shown, thestabilization posts 152 span between the edges of two adjacent cavities154, which corresponds to the approximate size of conductive contacts120. Thus, in the embodiments illustrated in FIGS. 13A-13B, the array ofstabilization posts 152 are off-centered from an x-y center below thearray of micro devices 175. In an embodiment, during the pick upoperation described below the off-centered stabilization posts 152 mayprovide for the creation of a moment when the array of transfer headscontact the array of micro devices in which the micro devices tiltslightly as a result of the applied downward pressure from the array oftransfer heads. In an embodiment, staggering the array of stabilizationposts 152 between the edges of two adjacent cavities 154 may also reducethe amount of contact area between the stabilization posts 152 and themicro devices 175, and reduce the total adhesion strength required to beovercome during the pick up operation.

FIGS. 14A-14D are cross-sectional side view illustrations of a method ofpicking up and transferring an array of micro devices from a carriersubstrate to a receiving substrate in accordance with an embodiment ofthe invention. FIG. 14A is a cross-sectional side view illustration ofan array of micro device transfer heads 204 supported by substrate 200and positioned over an array of micro devices 175 stabilized onstabilization posts 152 of stabilization layer 160 on carrier substrate160 in accordance with an embodiment of the invention. The array ofmicro devices 175 are then contacted with the array of transfer heads204 as illustrated in FIG. 14B. As illustrated, the pitch of the arrayof transfer heads 204 is an integer multiple of the pitch of the arrayof micro devices 175. If the array of stabilization posts 152 areoff-centered with an x-y center below the array of micro devices thismay create a moment between the array of micro devices 175 and array ofstabilization posts 152. A voltage is applied to the array of transferheads 204. The voltage may be applied from the working circuitry withina transfer head assembly 206 in electrical connection with the array oftransfer heads through vias 207. The array of micro devices 175 is thenpicked up with the array of transfer heads 204 as illustrated in FIG.14C. The array of micro devices 175 is then released onto contact pads302 (e.g. gold, indium, or tin) on receiving substrate 300 asillustrated in FIG. 14D. For example, the receiving substrate may be,but is not limited to, a display substrate, a lighting substrate, asubstrate with functional devices such as transistors or ICs, or asubstrate with metal redistribution lines.

In one embodiment, an operation is performed to create a phase change ina bonding layer connecting the array of micro devices 175 to thestabilization posts prior to or while picking up the array of microdevices. For example, the bonding layer may have a liquidus temperatureless than 350° C., or more specifically less than 200° C. In anembodiment, the bonding layer is a material such as indium or an indiumalloy. If a portion of the bonding layer is picked up with the microdevice, additional operations can be performed to control the phase ofthe portion of the bonding layer during subsequent processing. Forexample, heat can be applied to the bonding layer from a heat sourcelocated within the transfer head assembly 206, carrier substrate 160,and/or receiving substrate 300.

The operation of applying the voltage to create a grip pressure on thearray of micro devices can be performed in various orders. For example,the voltage can be applied prior to contacting the array of microdevices with the array of transfer heads, while contacting the microdevices with the array of transfer heads, or after contacting the microdevices with the array of transfer heads. The voltage may also beapplied prior to, while, or after creating a phase change in the bondinglayer.

Where the transfer heads 204 include bipolar electrodes, an alternatingvoltage may be applied across a the pair of electrodes in each transferhead 204 so that at a particular point in time when a negative voltageis applied to one electrode, a positive voltage is applied to the otherelectrode in the pair, and vice versa to create the pickup pressure.Releasing the array of micro devices from the transfer heads 204 may beaccomplished with a varied of methods including turning off the voltagesources, lower the voltage across the pair of silicon electrodes,changing a waveform of the AC voltage, and grounding the voltagesources.

In utilizing the various aspects of this invention, it would becomeapparent to one skilled in the art that combinations or variations ofthe above embodiments are possible for stabilizing an array of microdevices on a carrier substrate, and for transferring the array of microdevices. Although the present invention has been described in languagespecific to structural features and/or methodological acts, it is to beunderstood that the invention defined in the appended claims is notnecessarily limited to the specific features or acts described. Thespecific features and acts disclosed are instead to be understood asparticularly graceful implementations of the claimed invention usefulfor illustrating the present invention.

What is claimed is:
 1. A method of forming an array of micro devicescomprising: forming an array of stabilization posts over a device layer;transferring the array of stabilization posts and the device layer to acarrier substrate; and patterning the device layer to form acorresponding array of micro devices over the array of stabilizationposts.
 2. The method of claim 1, wherein forming the array ofstabilization posts over a device layer comprises: forming a patternedsacrificial layer including an array of openings over the device layer;forming a stabilization layer over the patterned sacrificial layer andwithin the array of openings to form the array of stabilization posts.3. The method of claim 2, wherein transferring the array ofstabilization posts and the device layer to the carrier substratecomprises bonding the stabilization layer to the carrier substrate. 4.The method of claim 3, further comprising completely removing thepatterned sacrificial layer.
 5. The method of claim 2, furthercomprising: forming the array of openings of the patterned sacrificiallayer directly over an array of conductive contacts on the device layer.6. The method of claim 3, further comprising removing a growth substratefrom the device layer after bonding the stabilization layer to thecarrier substrate and prior to patterning the device layer to form thearray of micro devices.
 7. The method of claim 6, further comprisingdepositing a conductive contact layer over the device layer afterremoving the growth substrate.
 8. The method of claim 7, furthercomprising annealing the conductive contact layer to form an ohmiccontact with the device layer.
 9. The method of claim 8, furthercomprising patterning the conductive contact layer to form an array ofconductive contacts on the device layer directly over the array ofstabilization posts.
 10. The method of claim 8, further comprisingannealling the conductive contact layer at a temperature of 300° C. orgreater.
 11. The method of claim 3, further comprising soft-baking thestabilization layer prior to bonding the stabilization layer to thecarrier substrate.
 12. The method of claim 2, further comprisinghard-baking the stabilization layer during or after bonding thestabilization layer to the carrier substrate.
 13. A method comprising:patterning a sacrificial layer to form an array of openings in thesacrificial layer exposing an array of conductive contacts formed on adevice layer, wherein the device layer comprises: an n-dopedsemiconductor layer; a p-doped semiconductor layer; and a quantum welllayer between the n-doped semiconductor layer and the p-dopedsemiconductor layer applying a thermosetting material over thesacrificial layer and within the array of openings; and curing thethermosetting material to solidify the thermosetting material.
 14. Themethod of claim 13, wherein curing comprises application of UV energy.15. The method of claim 13, wherein curing comprises application ofheat.
 16. The method of claim 13, wherein curing comprises achieving atleast 70% cross-linking of the thermosetting material.
 17. The method ofclaim 13, wherein the thermosetting material undergoes 10% or lessvolume shrinkage during curing.
 18. The method of claim 13, furthercomprising bonding a growth substrate supporting the device layer to acarrier substrate with the cured thermosetting material.
 19. The methodof claim 13, further comprising patterning the sacrificial layer and anetch stop detection layer underneath the sacrificial layer to form thearray of openings exposing the array of conductive contacts.
 20. Themethod of claim 13, further comprising detecting completion of etchingthrough the etch stop detection layer with visual observation.